Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.



Michael Gaitan


Micro-Electro-Mechanical Systems (MEMS) are devices that are fabricated using techniques similar to those used for integrated circuits (ICs) to create micrometer-sized mechanical structures (suspended bridges, cantilevers, membranes, fluid channels, etc.) that are often integrated with analog and digital circuitry. MEMS can act as sensors, receiving information from their environment, or as actuators, responding to a decision from the control system to change the environment. The ITRS has organized a MEMS Technology Working Group (TWG) which has developed a new chapter on MEMS for its 2011 report. The report focuses on MEMS technologies associated with mobile internet devices, such as smart phone and tablet computers. These applications represent the fastest growing segment in MEMS manufacturing, according to 2011 market forecasts by iSuppli, Yole Development, and SEMI. The report focuses on the leading MEMS devices used in mobile internet applications: accelerometers and gyroscopes, microphones, and RF MEMS, including resonators, varactors, and switches. The report also reviews emerging MEMS applications, including optical filters, picoprojectors, the electronic nose, microspeakers, and ultrasound devices.
Future Fab International


MEMS, ITRS, Technology Roadmap


Gaitan, M. (2012), MEMS, Future Fab International (Accessed July 14, 2024)


If you have any questions about this publication or are having problems accessing it, please contact

Created January 12, 2012, Updated February 19, 2017