Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Measurement Uncertainties in MEMS Kinematics by Super-Resolution Fluorescence Microscopy

Published

Author(s)

Craig D. McGray, Samuel M. Stavis, Jon C. Geist
Proceedings Title
Frontiers of Characterization and Metrology for Nanoelectronics
Conference Dates
March 25-28, 2013
Conference Location
Gaithersburg, MD

Keywords

Uncertainty, Super-Resolution, Fluorescence Microscopy, Localization Precision, MEMS, Kinematics, Nanoscale, Nanometer

Citation

McGray, C. , Stavis, S. and Geist, J. (2013), Measurement Uncertainties in MEMS Kinematics by Super-Resolution Fluorescence Microscopy, Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD (Accessed June 19, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created March 25, 2013, Updated February 19, 2017