McGray, C.
, Stavis, S.
and Geist, J.
(2013),
Measurement Uncertainties in MEMS Kinematics by Super-Resolution Fluorescence Microscopy, Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD
(Accessed December 12, 2024)
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Measurement Uncertainties in MEMS Kinematics by Super-Resolution Fluorescence Microscopy
Published
Author(s)
, ,
Proceedings Title
Frontiers of Characterization and Metrology for Nanoelectronics
Conference Dates
March 25-28, 2013
Conference Location
Gaithersburg, MD
Pub Type
Conferences
Keywords
Uncertainty, Super-Resolution, Fluorescence Microscopy, Localization Precision, MEMS, Kinematics, Nanoscale, Nanometer
Citation
Issues
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Created March 25, 2013, Updated February 19, 2017