@conference{25626,
  author = {Craig McGray and Samuel Stavis and Jon Geist},
  title = {Measurement Uncertainties in MEMS Kinematics by Super-Resolution Fluorescence Microscopy},
  year = {2013},
  month = {2013-03-25},
  publisher = {Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD},
  language = {en},
}