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PUBLICATIONS

Measurement Science for "More-Than-Moore" Technology Reliability Assessments

Published

Author(s)

Chukwudi A. Okoro, Jungjoon Ahn, Meagan V. Kelso, Pavel Kabos, Joseph Kopanski, Yaw S. Obeng

Abstract

In this paper, we will present an overview of metrology issues and some of the techniques currently under development in our group at NIST, aimed at understanding some of the potential performance limiting issues in such highly integrated systems. We will discuss our attempts to identify and characterize the various types of defects and relate them to where and why they form, without interrupting the responsible phenomena.
Proceedings Title
More than Moore
Conference Dates
October 7-12, 2012
Conference Location
Honolulu, HI, US
Conference Title
222nd Meeting of ECS — The Electrochemical Society
Pub Type
Conferences

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Keywords

reliability, more-than-moore, functional diversification
Semiconductors and Nanoelectronics

Citation

Okoro, C. , Ahn, J. , Kelso, M. , Kabos, P. , Kopanski, J. and Obeng, Y. (2012), Measurement Science for "More-Than-Moore" Technology Reliability Assessments, More than Moore, Honolulu, HI, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911714 (Accessed February 12, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created October 11, 2012, Updated October 12, 2021