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Measurement of the refractive index and thermo-optic coefficient of water near 193 nm

Published

Author(s)

John H. Burnett, Simon G. Kaplan
Citation
Journal of Microlithography Microfabrication and Microsystems
Volume
3

Citation

Burnett, J. and Kaplan, S. (2004), Measurement of the refractive index and thermo-optic coefficient of water near 193 nm, Journal of Microlithography Microfabrication and Microsystems (Accessed December 7, 2024)

Issues

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Created January 1, 2004, Updated February 17, 2017