TY  - JOUR
AU  - John Burnett
AU  - Simon Kaplan
C2  - Journal of Microlithography Microfabrication and Microsystems
DA  - 2004-01-01
LA  - en
M1  - 3
PB  - Journal of Microlithography Microfabrication and Microsystems
PY  - 2004
TI  - Measurement of the refractive index and thermo-optic coefficient of water near 193 nm
ER  -