@article{143796,
  author = {John Burnett and Simon Kaplan},
  title = {Measurement of the refractive index and thermo-optic coefficient of water near 193 nm},
  year = {2004},
  number = {3},
  month = {2004-01-01},
  publisher = {Journal of Microlithography Microfabrication and Microsystems},
  language = {en},
}