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Measurement of Low Defect Densities in SIMOX Using Transmission Electron Microscopy

Published

Author(s)

M. E. Twigg, H. L. Hughes, Peter Roitman, L. P. Allen
Proceedings Title
Extended Abstracts of the Proc., 1994 IEEE SOI Conference
Conference Dates
October 4-6, 1994
Conference Location
Nantucket, MA, USA

Citation

Twigg, M. , Hughes, H. , Roitman, P. and Allen, L. (1994), Measurement of Low Defect Densities in SIMOX Using Transmission Electron Microscopy, Extended Abstracts of the Proc., 1994 IEEE SOI Conference, Nantucket, MA, USA (Accessed April 21, 2024)
Created December 30, 1994, Updated October 12, 2021