TY - CONF AU - M. Twigg AU - H. Hughes AU - Peter Roitman AU - L. Allen C2 - Extended Abstracts of the Proc., 1994 IEEE SOI Conference, Nantucket, MA, USA DA - 1994-12-31 00:12:00 LA - en PB - Extended Abstracts of the Proc., 1994 IEEE SOI Conference, Nantucket, MA, USA PY - 1994 TI - Measurement of Low Defect Densities in SIMOX Using Transmission Electron Microscopy ER -