@conference{767006,
  author = {M. Twigg and H. Hughes and Peter Roitman and L. Allen},
  title = {Measurement of Low Defect Densities in SIMOX Using Transmission Electron Microscopy},
  year = {1994},
  month = {1994-12-31 00:12:00},
  publisher = {Extended Abstracts of the Proc., 1994 IEEE SOI Conference, Nantucket, MA, USA},
  language = {en},
}