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Measurement for Controlling Electromigration in Metallization Interconnects: Today and Tomorrow

Published

Author(s)

Harry A. Schafft, John S. Suehle, J. A. Lechner
Proceedings Title
Proc., Sixth International Conference on Interconnection Technology in Electronics
Conference Dates
February 18-20, 1992
Conference Location
Fellbach, 1, GM

Citation

Schafft, H. , Suehle, J. and Lechner, J. (1992), Measurement for Controlling Electromigration in Metallization Interconnects: Today and Tomorrow, Proc., Sixth International Conference on Interconnection Technology in Electronics, Fellbach, 1, GM (Accessed November 7, 2024)

Issues

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Created December 30, 1992, Updated October 12, 2021