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Measurement of the 100 nm NIST SRM® 1963 by Laser Surface Light Scattering, ed. by A Duparr {?} and B. Singh

Published

Author(s)

Thomas A. Germer, G W. Mulholland, J H. Kim, S H. Ehrman
Proceedings Title
Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components
Conference Dates
July 9-11, 2002
Conference Location
Seattle, WA
Conference Title
Proc. SPIE 4779

Citation

Germer, T. , Mulholland, G. , Kim, J. and Ehrman, S. (2002), Measurement of the 100 nm NIST SRM® 1963 by Laser Surface Light Scattering, ed. by A Duparr {?} and B. Singh, Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components, Seattle, WA (Accessed June 22, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 2002, Updated February 17, 2017