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Measurement of the 100 nm NIST SRM® 1963 by Laser Surface Light Scattering, ed. by A Duparr {?} and B. Singh

Published

Author(s)

Thomas A. Germer, G W. Mulholland, J H. Kim, S H. Ehrman
Proceedings Title
Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components
Conference Dates
July 9-11, 2002
Conference Location
Seattle, WA
Conference Title
Proc. SPIE 4779

Citation

Germer, T. , Mulholland, G. , Kim, J. and Ehrman, S. (2002), Measurement of the 100 nm NIST SRM® 1963 by Laser Surface Light Scattering, ed. by A Duparr {?} and B. Singh, Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components, Seattle, WA (Accessed February 26, 2024)
Created January 1, 2002, Updated February 17, 2017