Germer, T.
, Mulholland, G.
, Kim, J.
and Ehrman, S.
(2002),
Measurement of the 100 nm NIST SRM® 1963 by Laser Surface Light Scattering, ed. by A Duparr {?} and B. Singh, Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components, Seattle, WA
(Accessed May 3, 2024)
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Measurement of the 100 nm NIST SRM® 1963 by Laser Surface Light Scattering, ed. by A Duparr {?} and B. Singh
Published
Author(s)
, G W. Mulholland, J H. Kim, S H. Ehrman
Proceedings Title
Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components
Conference Dates
July 9-11, 2002
Conference Location
Seattle, WA
Conference Title
Proc. SPIE 4779
Pub Type
Conferences
Citation
Created January 1, 2002, Updated February 17, 2017