@conference{125601,
  author = {Thomas Germer and G Mulholland and J Kim and S Ehrman},
  title = {Measurement of the 100 nm NIST SRM® 1963 by Laser Surface Light Scattering, ed. by A Duparr {?} and B. Singh},
  year = {2002},
  month = {2002-01-01},
  publisher = {Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components, Seattle, WA},
  language = {en},
}