Wallace, W.
, Guttman, C.
and Antonucci, J.
(2001),
Mass Spectroscopy of Spin-on-glass Low-k Dielectric Precursors, Polymer Preprints, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853800
(Accessed April 19, 2024)
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Mass Spectroscopy of Spin-on-glass Low-k Dielectric Precursors
Published
Author(s)
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Citation
Polymer Preprints
Volume
42(1)
Pub Type
Journals
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Keywords
Polymer Processing, Spectroscopy, dielectric, hydrolysis-condensation, mass spectrometry, siloxane, silsesquioxane
Citation
Created December 31, 2000, Updated October 12, 2021