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Mass Spectroscopy of Spin-on-glass Low-k Dielectric Precursors

Published

Author(s)

William E. Wallace, Charles M. Guttman, Joseph M. Antonucci
Citation
Polymer Preprints
Volume
42(1)

Keywords

Polymer Processing, Spectroscopy, dielectric, hydrolysis-condensation, mass spectrometry, siloxane, silsesquioxane

Citation

Wallace, W. , Guttman, C. and Antonucci, J. (2001), Mass Spectroscopy of Spin-on-glass Low-k Dielectric Precursors, Polymer Preprints, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853800 (Accessed June 15, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created December 31, 2000, Updated October 12, 2021