TY  - JOUR
AU  - William Wallace
AU  - Charles Guttman
AU  - Joseph Antonucci
C2  - Polymer Preprints
DA  - 2001-01-01 00:01:00
LA  - en
M1  -  42(1)
PB  - Polymer Preprints
PY  - 2001
TI  - Mass Spectroscopy of Spin-on-glass Low-k Dielectric Precursors
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853800
ER  -