@article{835706,
  author = {William Wallace and Charles Guttman and Joseph Antonucci},
  title = {Mass Spectroscopy of Spin-on-glass Low-k Dielectric Precursors},
  year = {2001},
  number = { 42(1)},
  month = {2001-01-01 00:01:00},
  publisher = {Polymer Preprints},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853800},
  language = {en},
}