Zaghloul, M.
, Khera, D.
, Linholm, L.
and Reeve, C.
(1989),
A Machine-Learning Classification Approach for IC Manufacturing Control Based on Test Structure Measurements, IEEE Transactions on Semiconductor Manufacturing
(Accessed December 12, 2024)
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A Machine-Learning Classification Approach for IC Manufacturing Control Based on Test Structure Measurements
Published
Author(s)
, D. Khera, , C. P. Reeve
Citation
IEEE Transactions on Semiconductor Manufacturing
Volume
2
Issue
2
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created April 30, 1989, Updated October 12, 2021