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A Machine-Learning Classification Approach for IC Manufacturing Control Based on Test Structure Measurements

Published

Author(s)

Mona E. Zaghloul, D. Khera, Loren W. Linholm, C. P. Reeve
Citation
IEEE Transactions on Semiconductor Manufacturing
Volume
2
Issue
2

Citation

Zaghloul, M. , Khera, D. , Linholm, L. and Reeve, C. (1989), A Machine-Learning Classification Approach for IC Manufacturing Control Based on Test Structure Measurements, IEEE Transactions on Semiconductor Manufacturing (Accessed May 28, 2024)

Issues

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Created April 30, 1989, Updated October 12, 2021