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PUBLICATIONS

A Machine-Learning Classification Approach for IC Manufacturing Control Based on Test Structure Measurements

Published

Author(s)

Mona E. Zaghloul, D. Khera, Loren W. Linholm, C. P. Reeve
Citation
IEEE Transactions on Semiconductor Manufacturing
Volume
2
Issue
2
Pub Type
Journals

Citation

Zaghloul, M. , Khera, D. , Linholm, L. and Reeve, C. (1989), A Machine-Learning Classification Approach for IC Manufacturing Control Based on Test Structure Measurements, IEEE Transactions on Semiconductor Manufacturing (Accessed October 25, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created April 30, 1989, Updated October 12, 2021
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