@article{767806,
  author = {Mona Zaghloul and D. Khera and Loren Linholm and C. Reeve},
  title = {A Machine-Learning Classification Approach for IC Manufacturing Control Based on Test Structure Measurements},
  year = {1989},
  number = {2},
  month = {1989-05-01 00:05:00},
  publisher = {IEEE Transactions on Semiconductor Manufacturing},
  language = {en},
}