TY  - JOUR
AU  - Mona Zaghloul
AU  - D. Khera
AU  - Loren Linholm
AU  - C. Reeve
C2  - IEEE Transactions on Semiconductor Manufacturing
DA  - 1989-05-01 00:05:00
LA  - en
M1  - 2
PB  - IEEE Transactions on Semiconductor Manufacturing
PY  - 1989
TI  - A Machine-Learning Classification Approach for IC Manufacturing Control Based on Test Structure Measurements
ER  -