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Loose-particle detection in microelectronic devices:



John S Hilten, Paul S Lederer, J Franklin Mayo-Wells, Carol F Vezzetti
- NBS IR 78-1590
Report Number
NBS IR 78-1590


Hilten, J. , Lederer, P. , Mayo-Wells, J. and Vezzetti, C. (1979), Loose-particle detection in microelectronic devices:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], (Accessed April 19, 2024)
Created January 1, 1979, Updated May 19, 2023