@misc{1183891,
  author = {John S Hilten and Paul S Lederer and J Franklin Mayo-Wells and Carol F Vezzetti},
  title = {Loose-particle detection in microelectronic devices:},
  year = {1979},
  month = {1979-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.IR.78-1590},
  language = {en},
}