TY  - GEN
AU  - John S Hilten
AU  - Paul S Lederer
AU  - J Franklin Mayo-Wells
AU  - Carol F Vezzetti
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1979-01-01 05:01:00
DO  - https://doi.org/10.6028/NBS.IR.78-1590
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1979
TI  - Loose-particle detection in microelectronic devices:
ER  -