Kelly, T.
, Gribb, T.
, Martens, R.
, Larson, D.
, Tabat, N.
, Matyi, R.
and Shaffner, T.
(2001),
Local Electrode Atom Probes: Prospects for 3D Atomic Scale Metrology Applications in the Semiconductor and Data Storage Industries, Characterization and Metrology for USLI Technology 2000, , 1, UT
(Accessed April 19, 2024)
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Local Electrode Atom Probes: Prospects for 3D Atomic Scale Metrology Applications in the Semiconductor and Data Storage Industries
Published
Author(s)
T F. Kelly, T T. Gribb, R L. Martens, D J. Larson, N Tabat, , T J. Shaffner
Proceedings Title
Characterization and Metrology for USLI Technology 2000
Volume
550
Conference Location
, 1, UT
Conference Title
AIP Conference Proc. 550
Pub Type
Conferences
Citation
Created December 31, 2000, Updated October 12, 2021