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Local Electrode Atom Probes: Prospects for 3D Atomic Scale Metrology Applications in the Semiconductor and Data Storage Industries

Published

Author(s)

T F. Kelly, T T. Gribb, R L. Martens, D J. Larson, N Tabat, R J. Matyi, T J. Shaffner
Proceedings Title
Characterization and Metrology for USLI Technology 2000
Volume
550
Conference Location
, 1, UT
Conference Title
AIP Conference Proc. 550

Citation

Kelly, T. , Gribb, T. , Martens, R. , Larson, D. , Tabat, N. , Matyi, R. and Shaffner, T. (2001), Local Electrode Atom Probes: Prospects for 3D Atomic Scale Metrology Applications in the Semiconductor and Data Storage Industries, Characterization and Metrology for USLI Technology 2000, , 1, UT (Accessed June 14, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created December 31, 2000, Updated October 12, 2021