@conference{784626, author = {T Kelly and T Gribb and R Martens and D Larson and N Tabat and R Matyi and T Shaffner}, title = {Local Electrode Atom Probes: Prospects for 3D Atomic Scale Metrology Applications in the Semiconductor and Data Storage Industries}, year = {2001}, number = {550}, month = {2001-01-01 00:01:00}, publisher = {Characterization and Metrology for USLI Technology 2000, , 1, UT}, language = {en}, }