TY - CONF AU - T Kelly AU - T Gribb AU - R Martens AU - D Larson AU - N Tabat AU - R Matyi AU - T Shaffner C2 - Characterization and Metrology for USLI Technology 2000, , 1, UT DA - 2001-01-01 00:01:00 LA - en M1 - 550 PB - Characterization and Metrology for USLI Technology 2000, , 1, UT PY - 2001 TI - Local Electrode Atom Probes: Prospects for 3D Atomic Scale Metrology Applications in the Semiconductor and Data Storage Industries ER -