TY  - CONF
AU  - Kelly, T
AU  - Gribb, T
AU  - Martens, R
AU  - Larson, D
AU  - Tabat, N
AU  - Matyi, R
AU  - Shaffner, T
C2  - Characterization and Metrology for USLI Technology 2000, , 1, UT
DA  - 2001-01-01 00:01:00
LA  - en
M1  - 550
PB  - Characterization and Metrology for USLI Technology 2000, , 1, UT
PY  - 2001
TI  - Local Electrode Atom Probes: Prospects for 3D Atomic Scale Metrology Applications in the Semiconductor and Data Storage Industries
ER  -