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Linewidth Measurement Intercomparison on a BESOI Sample

Published

Author(s)

A. E. Villarrubia, Andras Vladar, J R. Lowney, Michael T. Postek, Richard A. Allen, Michael W. Cresswell, Rathindra Ghoshtagore
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE)
Volume
3998
Conference Location
Santa Clara, CA, USA

Citation

Villarrubia, A. , Vladar, A. , Lowney, J. , Postek, M. , Allen, R. , Cresswell, M. and Ghoshtagore, R. (2000), Linewidth Measurement Intercomparison on a BESOI Sample, Proc. Intl. Soc. for Optical Engineering (SPIE), Santa Clara, CA, USA (Accessed March 1, 2024)
Created December 30, 2000, Updated October 12, 2021