@conference{764921,
  author = {A. Villarrubia and Andras Vladar and J Lowney and Michael Postek and Richard Allen and Michael Cresswell and Rathindra Ghoshtagore},
  title = {Linewidth Measurement Intercomparison on a BESOI Sample},
  year = {2000},
  number = {3998},
  month = {2000-12-31 00:12:00},
  publisher = {Proc. Intl. Soc. for Optical Engineering (SPIE), Santa Clara, CA, USA},
  language = {en},
}