TY - CONF AU - A. Villarrubia AU - Andras Vladar AU - J Lowney AU - Michael Postek AU - Richard Allen AU - Michael Cresswell AU - Rathindra Ghoshtagore C2 - Proc. Intl. Soc. for Optical Engineering (SPIE), Santa Clara, CA, USA DA - 2000-12-31 00:12:00 LA - en M1 - 3998 PB - Proc. Intl. Soc. for Optical Engineering (SPIE), Santa Clara, CA, USA PY - 2000 TI - Linewidth Measurement Intercomparison on a BESOI Sample ER -