Kreider, K.
, Chen, D.
, DeWitt, D.
, Kimes, W.
and Tsai, B.
(2003),
Lightpipe Proximity Effects on Si Wafer Temperature in Rapid Thermal Processing Tools, 11th IEEE Int''l Conf. Advanced Thermal Processing - RTP 2003 , Charleston, SC, USA
(Accessed December 13, 2024)
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Lightpipe Proximity Effects on Si Wafer Temperature in Rapid Thermal Processing Tools
Published
Author(s)
K G. Kreider, D H. Chen, , W A. Kimes,
Proceedings Title
11th IEEE Int''l Conf. Advanced Thermal Processing - RTP 2003
Conference Dates
September 11, 2002
Conference Location
Charleston, SC, USA
Conference Title
Proc. 11th IEEE Int'l Conf. Advanced Thermal Processing - RTP 2003
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 31, 2002, Updated October 12, 2021