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Lightpipe Proximity Effects on Si Wafer Temperature in Rapid Thermal Processing Tools

Published

Author(s)

K G. Kreider, D H. Chen, D P. DeWitt, W A. Kimes, Benjamin K. Tsai
Proceedings Title
11th IEEE Int''l Conf. Advanced Thermal Processing - RTP 2003
Conference Dates
September 11, 2002
Conference Location
Charleston, SC, USA
Conference Title
Proc. 11th IEEE Int'l Conf. Advanced Thermal Processing - RTP 2003

Citation

Kreider, K. , Chen, D. , DeWitt, D. , Kimes, W. and Tsai, B. (2003), Lightpipe Proximity Effects on Si Wafer Temperature in Rapid Thermal Processing Tools, 11th IEEE Int''l Conf. Advanced Thermal Processing - RTP 2003 , Charleston, SC, USA (Accessed July 17, 2024)

Issues

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Created December 31, 2002, Updated October 12, 2021