@conference{804246,
  author = {K Kreider and D Chen and D DeWitt and W Kimes and Benjamin Tsai},
  title = {Lightpipe Proximity Effects on Si Wafer Temperature in Rapid Thermal Processing Tools},
  year = {2003},
  month = {2003-01-01 00:01:00},
  publisher = {11th IEEE Int''l Conf. Advanced Thermal Processing - RTP 2003 , Charleston, SC, USA},
  language = {en},
}