TY  - CONF
AU  - K Kreider
AU  - D Chen
AU  - D DeWitt
AU  - W Kimes
AU  - Benjamin Tsai
C2  - 11th IEEE Int''l Conf. Advanced Thermal Processing - RTP 2003 , Charleston, SC, USA
DA  - 2003-01-01 00:01:00
LA  - en
PB  - 11th IEEE Int''l Conf. Advanced Thermal Processing - RTP 2003 , Charleston, SC, USA
PY  - 2003
TI  - Lightpipe Proximity Effects on Si Wafer Temperature in Rapid Thermal Processing Tools
ER  -