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Knowledge Extraction Techniques for Expert System Assisted Wafer Screening

Published

Author(s)

D. Khera, Michael W. Cresswell, Loren W. Linholm, G. Ramanathan, J. Buzzeo, A. Nagarajan
Proceedings Title
Proc., International Semiconductor Manufacturing Science Symposium
Conference Dates
May 21-23, 1990
Conference Location
Burlingame, CA, USA

Citation

Khera, D. , Cresswell, M. , Linholm, L. , Ramanathan, G. , Buzzeo, J. and Nagarajan, A. (1990), Knowledge Extraction Techniques for Expert System Assisted Wafer Screening, Proc., International Semiconductor Manufacturing Science Symposium, Burlingame, CA, USA (Accessed April 20, 2024)
Created December 30, 1990, Updated October 12, 2021