@conference{846426, author = {D. Khera and Michael Cresswell and Loren Linholm and G. Ramanathan and J. Buzzeo and A. Nagarajan}, title = {Knowledge Extraction Techniques for Expert System Assisted Wafer Screening}, year = {1990}, month = {1990-12-31 00:12:00}, publisher = {Proc., International Semiconductor Manufacturing Science Symposium, Burlingame, CA, USA}, language = {en}, }