TY  - CONF
AU  - D. Khera
AU  - Michael Cresswell
AU  - Loren Linholm
AU  - G. Ramanathan
AU  - J. Buzzeo
AU  - A. Nagarajan
C2  - Proc., International Semiconductor Manufacturing Science Symposium, Burlingame, CA, USA
DA  - 1990-12-31 00:12:00
LA  - en
PB  - Proc., International Semiconductor Manufacturing Science Symposium, Burlingame, CA, USA
PY  - 1990
TI  - Knowledge Extraction Techniques for Expert System Assisted Wafer Screening
ER  -