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Ion Kinetic-Energy Distributions in Argon rf Glow Discharges

Published

Author(s)

James K. Olthoff, Richard J. Van Brunt, S. B. Radovanov
Citation
Journal of Applied Physics
Volume
72
Issue
10

Citation

Olthoff, J. , Van Brunt, R. and Radovanov, S. (1992), Ion Kinetic-Energy Distributions in Argon rf Glow Discharges, Journal of Applied Physics, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=20553 (Accessed March 29, 2024)
Created October 31, 1992, Updated October 12, 2021