Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Ion Kinetic-Energy Distributions in Argon rf Glow Discharges

Published

Author(s)

James K. Olthoff, Richard J. Van Brunt, S. B. Radovanov
Citation
Journal of Applied Physics
Volume
72
Issue
10

Citation

Olthoff, J. , Van Brunt, R. and Radovanov, S. (1992), Ion Kinetic-Energy Distributions in Argon rf Glow Discharges, Journal of Applied Physics, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=20553 (Accessed April 15, 2024)
Created October 31, 1992, Updated October 12, 2021