TY  - JOUR
AU  - James Olthoff
AU  - Richard Van Brunt
AU  - S. Radovanov
C2  - Journal of Applied Physics
DA  - 1992-11-01 00:11:00
LA  - en
M1  - 72
PB  - Journal of Applied Physics
PY  - 1992
TI  - Ion Kinetic-Energy Distributions in Argon rf Glow Discharges
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=20553
ER  -