@article{782066,
  author = {James Olthoff and Richard Van Brunt and S. Radovanov},
  title = {Ion Kinetic-Energy Distributions in Argon rf Glow Discharges},
  year = {1992},
  number = {72},
  month = {1992-11-01 00:11:00},
  publisher = {Journal of Applied Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=20553},
  language = {en},
}