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Ion energy disribution and optical measurements in high-density, inductively coupled C^4F^6 discharges

Published

Author(s)

Eric C. Benck, Amanda N. Goyettes, Yicheng Wang
Citation
Journal of Applied Physics
Volume
94
Issue
3

Citation

Benck, E. , Goyettes, A. and Wang, Y. (2003), Ion energy disribution and optical measurements in high-density, inductively coupled C^4F^6 discharges, Journal of Applied Physics, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31502 (Accessed February 25, 2024)
Created July 31, 2003, Updated October 12, 2021