Benck, E.
, Goyettes, A.
and Wang, Y.
(2003),
Ion energy disribution and optical measurements in high-density, inductively coupled C^4F^6 discharges, Journal of Applied Physics, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31502
(Accessed April 26, 2024)
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Ion energy disribution and optical measurements in high-density, inductively coupled C^4F^6 discharges
Published
Author(s)
, Amanda N. Goyettes,
Citation
Journal of Applied Physics
Volume
94
Issue
3
Pub Type
Journals
Download Paper
Citation
Created July 31, 2003, Updated October 12, 2021