@article{773106,
  author = {Eric Benck and Amanda Goyettes and Yicheng Wang},
  title = {Ion energy disribution and optical measurements in high-density, inductively coupled C^4F^6 discharges},
  year = {2003},
  number = {94},
  month = {2003-08-01 00:08:00},
  publisher = {Journal of Applied Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31502},
  language = {en},
}