TY  - JOUR
AU  - Eric Benck
AU  - Amanda Goyettes
AU  - Yicheng Wang
C2  - Journal of Applied Physics
DA  - 2003-08-01 00:08:00
LA  - en
M1  - 94
PB  - Journal of Applied Physics
PY  - 2003
TI  - Ion energy disribution and optical measurements in high-density, inductively coupled C^4F^6 discharges
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31502
ER  -