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Ion Compositions and Energies in Inductively Coupled Plasmas Containing SF6

Published

Author(s)

Amanda N. Goyettes, Yicheng Wang, James K. Olthoff
Citation
Journal of Vacuum Science and Technology A
Volume
19
Issue
4

Citation

Goyettes, A. , Wang, Y. and Olthoff, J. (2001), Ion Compositions and Energies in Inductively Coupled Plasmas Containing SF6, Journal of Vacuum Science and Technology A, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=24749 (Accessed February 23, 2024)
Created June 30, 2001, Updated October 12, 2021