TY  - JOUR
AU  - Amanda Goyettes
AU  - Yicheng Wang
AU  - James Olthoff
C2  - Journal of Vacuum Science and Technology A
DA  - 2001-07-01 00:07:00
LA  - en
M1  - 19
PB  - Journal of Vacuum Science and Technology A
PY  - 2001
TI  - Ion Compositions and Energies in Inductively Coupled Plasmas Containing SF6
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=24749
ER  -