@article{769266,
  author = {Amanda Goyettes and Yicheng Wang and James Olthoff},
  title = {Ion Compositions and Energies in Inductively Coupled Plasmas Containing SF6},
  year = {2001},
  number = {19},
  month = {2001-07-01 00:07:00},
  publisher = {Journal of Vacuum Science and Technology A},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=24749},
  language = {en},
}