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PUBLICATIONS

Investigation of the two-dimensional shape of ion-implanted regions:

Published

Author(s)

P Roitman, J Albers, J R Ehrstein, D R Myers
Citation
- NBS IR 81-2398
Report Number
NBS IR 81-2398
Pub Type
NIST Pubs

Download Paper

DOI Link

Citation

Roitman, P. , Albers, J. , Ehrstein, J. and Myers, D. (1981), Investigation of the two-dimensional shape of ion-implanted regions:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.IR.81-2398 (Accessed December 12, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 1981, Updated May 19, 2023