TY - GEN AU - P Roitman AU - J Albers AU - J R Ehrstein AU - D R Myers C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 1981-01-01 05:01:00 DO - https://doi.org/10.6028/NBS.IR.81-2398 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 1981 TI - Investigation of the two-dimensional shape of ion-implanted regions: ER -