@misc{1180431, author = {P Roitman and J Albers and J R Ehrstein and D R Myers}, title = {Investigation of the two-dimensional shape of ion-implanted regions:}, year = {1981}, month = {1981-01-01 05:01:00}, publisher = {, National Institute of Standards and Technology, Gaithersburg, MD}, doi = {https://doi.org/10.6028/NBS.IR.81-2398}, language = {en}, }