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INTERNATIONAL ROADMAP FOR DEVICES AND SYSTEMSTM 2023 EDITION METROLOGY

Published

Author(s)

Elisabeth Mansfield, Bryan Barnes, R Joseph Kline, Andras E. Vladar, Yaw S. Obeng, Albert Davydov

Abstract

The Metrology Chapter identifies emerging measurement challenges from devices, systems, and integration of new materials in the semiconductor industry and describes research and development pathways for meeting them. This includes but not limited to, measurement needs for extending CMOS, accelerating beyond CMOS technologies, novel communication devices, sensors, and transducers, materials characterization, and structure-function relationships. This also includes advances in metrology required for research and development, and process control in manufacturing environments[1-6].
Citation
International Roadmap for Devices and Systems (IRDS™)

Keywords

IDRS, Roadmap, Metrology

Citation

Mansfield, E. , Barnes, B. , Kline, R. , Vladar, A. , Obeng, Y. and Davydov, A. (2023), INTERNATIONAL ROADMAP FOR DEVICES AND SYSTEMSTM 2023 EDITION METROLOGY, International Roadmap for Devices and Systems (IRDS™), [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=956664, https://irds.ieee.org/editions/2023 (Accessed March 5, 2024)
Created December 8, 2023, Updated December 18, 2023