@misc{1222896,
  author = {Elisabeth Mansfield and Bryan Barnes and R Joseph Kline and Andras E. Vladar and Yaw S. Obeng and Albert Davydov},
  title = {INTERNATIONAL ROADMAP FOR DEVICES AND SYSTEMSTM 2023 EDITION METROLOGY},
  year = {2023},
  month = {2023-12-08 05:12:00},
  publisher = {International Roadmap for Devices and Systems (IRDS™)},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=956664},
  language = {en},
}