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Integration of Scanning Tunneling Microscope Nanolithography and Electronics Device Processing

Published

Author(s)

John A. Dagata, W. F. Tseng, J. Bennett, E. A. Dobisz, J. Schneir, Howard H. Harary
Citation
Journal of Vacuum Science and Technology
Volume
A 10
Issue
4

Citation

Dagata, J. , Tseng, W. , Bennett, J. , Dobisz, E. , Schneir, J. and Harary, H. (1992), Integration of Scanning Tunneling Microscope Nanolithography and Electronics Device Processing, Journal of Vacuum Science and Technology (Accessed March 28, 2024)
Created July 31, 1992, Updated October 12, 2021