@article{766086,
  author = {John Dagata and W. Tseng and J. Bennett and E. Dobisz and J. Schneir and Howard Harary},
  title = {Integration of Scanning Tunneling Microscope Nanolithography and Electronics Device Processing},
  year = {1992},
  number = {A 10},
  month = {1992-08-01 00:08:00},
  publisher = {Journal of Vacuum Science and Technology},
  language = {en},
}